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den dargestellten Herausforderungen gerecht zu werden
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The Physics of Microfabrication formatIsbn:Hardcover - 9780306408632 den dargestellten Herausforderungen gerecht zuThe Physical Electronics Department of SRI International (formerly Stanford Research Institute) has been pioneering the development of devices fabricated to submicron tolerances for well over 20 years. In 1961, a landmark paper on electron beam lithography and its associated technologies was published by K. R. Shoulderst (then at SRI), which set the stage for our subsequent efforts in this field. He had the foresight to believe that the building of
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