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such as VDI 1998 (Chemnitz)
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Wafer Bonding formatIsbn:Softcover - 9783642059155 such as VDI 1998 (Chemnitz)During the past decade direct wafer bonding has developed into a mature materials integration technology. This book presents state of the art reviews of the most important applications of wafer bonding written by experts from industry and academia. The topics include bonding based fabrication methods of silicon on insulator, photonic crystals, VCSELs, SiGe based FETs, MEMS together with hybrid integration and laser lift off. The non specialist will
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